JPS6349218A - 空気清浄装置 - Google Patents
空気清浄装置Info
- Publication number
- JPS6349218A JPS6349218A JP19198286A JP19198286A JPS6349218A JP S6349218 A JPS6349218 A JP S6349218A JP 19198286 A JP19198286 A JP 19198286A JP 19198286 A JP19198286 A JP 19198286A JP S6349218 A JPS6349218 A JP S6349218A
- Authority
- JP
- Japan
- Prior art keywords
- air
- clean
- fan
- clean air
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012423 maintenance Methods 0.000 claims description 22
- 230000002093 peripheral effect Effects 0.000 abstract description 2
- 230000007935 neutral effect Effects 0.000 description 10
- 238000004140 cleaning Methods 0.000 description 6
- 230000003749 cleanliness Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19198286A JPS6349218A (ja) | 1986-08-19 | 1986-08-19 | 空気清浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19198286A JPS6349218A (ja) | 1986-08-19 | 1986-08-19 | 空気清浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6349218A true JPS6349218A (ja) | 1988-03-02 |
| JPH022605B2 JPH022605B2 (en]) | 1990-01-18 |
Family
ID=16283664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19198286A Granted JPS6349218A (ja) | 1986-08-19 | 1986-08-19 | 空気清浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6349218A (en]) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07135165A (ja) * | 1993-11-11 | 1995-05-23 | Nikon Corp | 走査型露光装置 |
| US5486896A (en) * | 1993-02-19 | 1996-01-23 | Nikon Corporation | Exposure apparatus |
| US6213607B1 (en) | 1994-02-14 | 2001-04-10 | Nikon Corporation | Exposure apparatus and field stop thereof |
| JP2013188707A (ja) * | 2012-03-14 | 2013-09-26 | Taisei Corp | ファンフィルタユニット |
-
1986
- 1986-08-19 JP JP19198286A patent/JPS6349218A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5486896A (en) * | 1993-02-19 | 1996-01-23 | Nikon Corporation | Exposure apparatus |
| JPH07135165A (ja) * | 1993-11-11 | 1995-05-23 | Nikon Corp | 走査型露光装置 |
| US6213607B1 (en) | 1994-02-14 | 2001-04-10 | Nikon Corporation | Exposure apparatus and field stop thereof |
| US6325516B1 (en) | 1994-02-14 | 2001-12-04 | Nippon Kogaku Kk | Exposure apparatus and field stop thereof |
| JP2013188707A (ja) * | 2012-03-14 | 2013-09-26 | Taisei Corp | ファンフィルタユニット |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH022605B2 (en]) | 1990-01-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |